Agenda
Many thanks for your interest in MEMS Manufacturing 2022! It was a fantastic online conference with 190+ participants and we look forward to seeing you at our upcoming online events.
You can still register to access the recorded presentations and slides in electronic format from MEMS Manufacturing 2022. click here to register and then you’ll receive a link to download the conference materials. For more information or if you have any questions, please contact Jessica Ingram at jessica@microtechventures.com.
MEMS Manufacturing 2022
4th Annual Conference and Exhibition
March 1-3, 2022
ONLINE
Tuesday, March 1
US Eastern Time (ET)
| Welcome, Opening Remarks, and Icebreaker Session Mike Pinelis, PhD President and CEO Microtech Ventures |
10:00 AM – 10:45 AM |
| Trends in MEMS Manufacturing and Evolution of MEMS Foundries Capabilities Dimitrios Damianos, PhD Sr. Analyst, Imaging and MEMS Yole Developpement |
10:45 AM – 11:30 AM |
| Integrated Functional Devices on Complex Surfaces with Direct Write Atomic Layer Deposition Technology Maksym Plakhotnyuk, PhD CEO Atlant 3D Nanosystems -- Gold Sponsor |
11:30 AM – 11:45 AM |
| Lithography for MEMS Applications: Emerging Process Trends and Developments Keith Cooper Technical Sales Engineer Neutronix -- Silver Sponsor |
11:45 AM – 11:55 AM |
| Networking Lunch | 11:55 AM – 01:00 PM |
| MEMS Fabrication Platform for Navigation-Grade Gyroscopes Philippe Robert, PhD Business Development Manager and Sr. Expert for MEMS CEA Leti |
01:00 PM – 01:20 PM |
| Manufacturing Paradigm Shift and 3D Printing in Journey to Trillion Sensor Nodes Janusz Bryzek, PhD Executive Chairman, Chief Visionary Officer Exo Imaging |
01:20 PM – 02:10 PM |
| Quality Planning and Assurance in MEMS Manufacturing Jayson Loewen Senior NPI Manager Teledyne -- Silver Sponsor |
02:10 PM – 02:25 PM |
| Networking Break | 02:25 PM – 03:10 PM |
| A Reality Check for Medical MEMS Manufacturing Ariel Cao CEO InjectSense |
03:10 PM – 03:30 PM |
| Enabling Miniaturization with Micro 3D Printing John Kawola CEO Boston Micro Fabrication -- Gold Sponsor |
03:30 PM – 03:40 PM |
| Advanced Silicon Wafers with Built-in Patterns Adding Value in MEMS Volume Production Jani Karttunen Product Manager for Patterned Products Okmetic -- Silver Sponsor |
03:40 PM – 03:50 PM |
| CMUT Fabrication Platform: Combining Performance and Volume Manufacturing Paul Bekkers Business Development Manager Philips MEMS Foundry -- Silver Sponsor |
03:50 PM – 03:55 PM |
| MEMS Fabrication and Supply Chain in Asia Doug Sparks, PhD CTO Hanking Electronics |
03:545 PM – 04:35 PM |
| Closing Remarks and Networking Session Mike Pinelis, PhD President and CEO Microtech Ventures |
04:35 PM – 04:45 PM |
Wednesday, March 2
US Eastern Time (ET)
| Welcome and Opening Remarks Mike Pinelis, PhD President and CEO Microtech Ventures |
10:00 AM – 10:15 AM |
| Panel Discussion -- MEMS Manufacturing Supply Chain Doug Sparks, PhD Tony Flannery, PhD Aric Shorey, PhD Paul Pickering Arjun Kumar Kantimahanti |
10:15 AM – 11:45 AM |
| Networking Lunch | 11:45 AM – 12:45 PM |
| Next-Generation Fabrication Processes for MEMS and Sensors Steve Kosier, PhD CTO Skywater Technology Foundry |
12:45 PM – 01:05 PM |
| Manufacturing Process Challenges for MEMS Based Holography SLM Devices Christoph Hohle, PhD Manager Technology Development Spatial Light Modulators Fraunhofer IPMS -- R&D Partner |
01:05 PM – 01:35 PM |
| Fabrication Process Technologies and Requirements for Deep Silicon Micro-Speakers Holger Conrad Head of MEMS Production and Development Arioso Systems |
01:35 PM – 01:55 PM |
| Fabrication of MEMS Based Sensors and Actuators: From Silicon Wafers to Glass Panel Integration Xavier Rottenberg, PhD Fellow Imec -- Silver Sponsor |
01:55 PM – 02:15 PM |
| High Throughput Ashing for MEMS Manufacturing Yin Xu R&D and Product Manager ULVAC -- Bronze Sponsor |
02:15 PM – 02:25 PM |
| Networking Break | 02:25 PM – 03:15 PM |
| MEMS Planarization CMP Processes: Emerging Techniques and Applications Norio Kamitsubo General Manager D-Process |
03:15 PM – 03:35 PM |
| Simple, Cost-Effective Techniques for Rapid Prototyping 3D Printed Microfluidics and Microdevices Brian O'Grady Postdoctoral Researcher Vanderbilt University |
03:35 PM – 03:55 PM |
| Nanoimprint Lithography: Emerging Techniques and Applications Jayant Patil Business Development Manager Kyodo International -- Bronze Sponsor |
03:55 PM – 04:05 PM |
| Through Glass Vias in MEMS Processing Aric Shorey, PhD Director of Glass Technology Menlo Micro |
04:05 PM – 04:35 PM |
| Closing Remarks and Networking Session Mike Pinelis, PhD President and CEO Microtech Ventures |
04:35 PM – 04:45 PM |
Thursday, March 3
US Eastern Time (ET)
| Welcome and Opening Remarks Mike Pinelis, PhD President and CEO Microtech Ventures |
10:00 AM – 10:15 AM |
| MEMS Manufacturing Processes: Trends, Innovations, and Emerging Techniques Romain Fraux CEO System Plus Consulting |
10:15 AM – 10:55 AM |
| Monolithic CMOS MEMS Fabrication: Techniques, Challenges, and Applications Arjun Kumar Kantimahanti Sr. Vice President of Technology Development SilTerra -- Gold Sponsor |
10:55 AM – 11:05 AM |
| MPD: A Novel Wafer-Scale Nanoparticle Deposition Process for 3D Microstructures Thomas Russell CEO Mesoline |
11:05 AM – 11:25 AM |
| Managing a High-Mix and Low-Volume MEMS R&D Fab by Applying KPIs Thomas Zarbock Division Director for MEMS Engineering, Manufacturing and Test Fraunhofer IPMS -- R&D Partner |
11:25 AM – 11:55 AM |
| Networking Lunch | 11:55 AM – 01:00 PM |
| Thin Film PiezoMEMS Fabrication: Emerging Materials, Processes, and Techniques Gwenael Le Rhun, PhD Project Manager and Sr. Expert on Piezoelectric Material Integration CEA Leti |
01:00 PM – 01:20 PM |
| Advanced Packaging for MEMS Based Sensors and Actuators Using Thin Glass Ulrich Peuchert, PhD Global Business Development and Product Manager SCHOTT |
01:20 PM – 01:40 PM |
| Getter Films Integration in High-Volume MEMS Fabrication Processes Marco Moraja, PhD Business Manager for Getters and Dispensers SAES Group -- Silver Sponsor |
01:40 PM – 01:45 PM |
| Wafer Level Monolithic Fabrication of Micro-Optics Davide Lomellini Area Sales Manager SUSS MicroOptics -- Bronze Sponsor |
01:45 PM – 01:55 PM |
| Making MEMS Design Easy: From Simulation to Product Philipp Mehner Product Manager i-ROM -- Bronze Sponsor |
01:55 PM – 02:10 PM |
| Networking Break | 02:10 PM – 02:50 PM |
| Reaching Silicon-based NEMS Performances with 3D Printing Technology Stefano Stassi, PhD Assistant Professor Politecnico di Torino |
02:50 PM – 03:15 PM |
| Pathway for Reliable Metallized Through-Glass Vias Chukwudi Okoro, PhD Sr. Research Scientist Corning |
03:15 PM – 03:40 PM |
| Piezoelectric Thin Films Processes for MEMS Fabrication Hiroshi Miyajima, PhD General Manager, MEMS Solutions Sumitomo Precision Products |
03:40 PM – 04:00 PM |
| Piezoelectric Materials for Fabricating Laser Beam Scanning MEMS Devices with Performance Scalability Andrea Onetti Analog and MEMS Group Vice President STMicroelectronics |
04:00 PM – 04:30 PM |
| Closing Remarks and Networking Session Mike Pinelis, PhD President and CEO Microtech Ventures |
04:30 PM – 04:40 PM |
Agenda and panels are subject to change.
