Sponsors

Sponsorships for MEMS Manufacturing 2022 are available. For further information and questions about sponsorships, please click here.


Gold Sponsor

http://www.silterra.com

SilTerra Malaysia is a semiconductor wafer foundry offering a full range of process technologies covering our core business in CMOS technologies (advanced logic, RFCMOS, mixed signal and high voltage) to leading edge technologies in MEMS, silicon photonics, bio-photonics and power. SilTerra’s wafer fab has a capacity of 40,000 eight-inch wafers per month. SilTerra also offers MEMS foundry services and a unique MEMS-on-CMOS technology. Under the MEMS foundry services, we help customers realize working prototypes from their proof of concept, support the transfer or set-up of customer owned process and ramp-up to high volume manufacturing (all in one fab). With our MEMS-on-CMOS technology, we have the capability to build the MEMS devices on pre-processed CMOS wafers thus offering a “truly monolithic MEMS integrated solution”. This integrated technology provides a cost-effective, multi-functional chip with a smaller footprint. SilTerra provides proven silicon validated MEMS devices to our customers. SilTerra offers various MEMS on CMOS devices such as: pMUT(piezoelectric micromachined ultrasonic transducers), BAW and SAW (bulk and surface acoustic wave) resonators, optical micro-mirror arrays, zero level package (ZLP), nano-wires, and sensors. Applications include frequency control products, data projectors, finger print sensors, medical imaging and industrial sensors.


Silver Sponsor

http:// www.okmetic.com

Okmetic, founded in 1985, is the leading supplier of advanced, high value-added, silicon wafers for the manufacture of MEMS and sensors as well as RF and power applications. Okmetic has the most extensive 150-200mm wafer portfolio in the market comprising of comprehensive lines of silicon-on-insulator (SOI) and high resistivity RFSi® wafers as well as single side polished (SSP) and double side polished (DSP) wafers. The company’s decades-long crystal growth, wafering, and SOI expertise and in-house capabilities for lithographic patterning and deep reactive-ion etching guarantee the optimal platform for the manufacture of even the most advanced of applications. Okmetic’s headquarters is located in Finland, where the majority of the company’s silicon wafers is manufactured. Worldwide sales organization and technical support in Europe, the United States, Japan and the Asia-Pacific region ensure quick local service, rapid prototyping and highly optimized wafer solutions meeting your device and process needs.


Bronze Sponsor

https://www.kyodo-inc.co.jp/english

MEMS and Nanofabrication Solutions: Kyodo International, Inc. is a pure-play foundry that specializes in MEMS and nanofabrication contract manufacturing. We provide prototyping and volume production services for MEMS, sensors, biomedical, optical, and IoT devices for a variety of applications. Kyodo provides custom solutions and services in thin-film deposition, wafer bonding, polishing (CMP), dry and wet etching, nanoimprint lithography, photolithography, and many other key microfabrication processes. Kyodo also supplies sputtering targets and target bonding services. In addition, we provide comprehensive nanoimprint related services such as mold fabrication, anti-stick coating, imprinting, and mold replication. Kyodo supports complete R&D work to meet customer needs, thus decreasing R&D costs and accelerating time to market. We work with start-ups, academia, government, defense, and aerospace customers. Kyodo is well-represented in Silicon Valley and serves the US and Canadian markets.


Bronze Sponsor

http://www.ulvac.com/services/MEMS-Foundry.cfm

ULVAC Technologies, Inc. (ULVAC) was established in 1992 as the US subsidiary of ULVAC, Inc. Headquartered in Methuen, Massachusetts, ULVAC provides a broad portfolio of manufacturing equipment for the vacuum, materials and thin film industries. ULVAC's solutions diversely incorporate equipment, materials, analysis, and services for flat panel displays, electronic components, semiconductors, MEMS and general-industry equipment. In addition, the Methuen facility is equipped with a class-10 cleanroom for process development, customer demonstration and manufacturing of the ENVIRO solvent-free dry photo resist stripper and compound semiconductor materials etch systems. Other in-house services include foundry etch (for deep oxide and compound semiconductor materials), thermal processing, materials characterization, and vacuum pump/leak detector repair. ULVAC supports a variety of MEMS production technologies, for applications ranging from micro sensors to flow channel modules, optical switches, and bio-MEMS.


Research and Development Partner


The Fraunhofer Institute for Photonic Microsystems IPMS in Dresden, Germany, is your access to know-how, expertise and modern R&D infrastructure in the field of optical sensors and actuators, integrated circuits, microsystems (MEMS/MOEMS) and nanoelectronics. Fraunhofer IPMS is one of 75 institutes of the Fraunhofer-Gesellschaft, the leading organization for applied research in Europe. It is devoted to research of practical utility. Relying on 29,000 employees, the Fraunhofer-Gesellschaft has a research budget of 2.8 billion euros.



Sponsorship Opportunities

For further information or questions about sponsorships, please contact Jessica Ingram at
jessica@microtechventures.com or call 360-929-0114.

Platinum Sponsor ($15,000) – includes:

  • Five (5) conference passes (transferable to individuals outside of sponsor’s company or organization)
  • Conference participant list (with contact information)
  • Opportunity to give a 10-minute talk during main conference session
  • Virtual exhibit booth with access to our AI-enabled matchmaking platform
  • Access to all live talks, recordings, and presentation slides
  • Access to the online AI-enabled matchmaking platform
  • Recognition as Platinum Sponsor, company logo and description on event website and matchmaking platform; marketing exposure through preconference email and social media promotions
  • Event promotions will reach 70,000 to 80,000 individuals in the medical, wearables, sensors, MEMS, electronics, and semiconductor industry segments.

Gold Sponsor ($10,000) – includes:

  • Four (4) conference passes (transferable to individuals outside of sponsor’s company or organization)
  • Recognition as Gold Sponsor
  • All other items the same as Platinum Sponsor

Silver Sponsor ($7,500) – includes:

  • Three (3) conference passes (transferable to individuals outside of sponsor’s company or organization)
  • Recognition as Silver Sponsor
  • Opportunity to give a 5-minute talk during main conference session
  • All other items the same as Platinum Sponsor

Bronze Sponsor ($5,000) – includes:

  • Two (2) conference passes (transferable to individuals outside of sponsor’s company or organization)
  • Recognition as Bronze Sponsor
  • Opportunity to give a 5-minute talk during main conference session
  • All other items the same as Platinum Sponsor

Online sponsor space is limited. Sign up today!


Past Sponsors


Many thanks to our sponsors from the 2013-2018 events.

http://www.kstworld.co.jp

Platinum Sponsor

KST World Corp. services as a wafer foundry providing various services, especially super thick oxide film up to 12 inch size over 25um, with patented technology for over 20 years. Using thick oxide film technology, we provide unique thick BOX SOI wafers, not only normal SOI wafer or cavity SOI wafer. Today, KST World’s unique and advanced technologies meet and drive customer’s technological requirements in worldwide market.


http://www.micralyne.com

Gold Sponsor

Micralyne is a leading independent MEMS foundry, and volume manufacturer of novel MEMS devices with over 30 years of MEMS development and manufacturing expertise. Micralyne’s fabrication solutions have been used in MEMS sensors for precise measurement devices, MEMS optical switching technology, lab-on-a-chip components, micro-needles, pressure sensors, gas sensors, accelerometers, thermal imaging sensors, and microfluidics. We are both ISO9001 and ISO13485 certified. Micralyne’s MEMS foundry model allows clients to access enhanced services such as validated MEMS technology processes and platforms, advanced packaging – WLP, TSV, TGV, discrete and custom sub-assembly services. This foundry model has successfully produced products for industries such as: bio-medical, aerospace, automotive, oil and gas, telecom, and industrial sensors. Micralyne offers our customers a strategic partnership with deep technical knowledge and fabrication capabilities coupled with an integrated quality and project management support. Connect with us today and leverage our experience to manufacture your MEMS devices.


http://www.xfab.com

Gold Sponsor

X-FAB MEMS Foundry offers unsurpassed experience, expertise and execution with its high-volume MEMS manufacturing service. X-FAB draws on more than 20 years MEMS manufacturing experience and continues to meet the new demands for this rapidly expanding group of technologies in terms of time to market, quality assurance, high yield and supply-chain management tools. Operating from six fabs for MEMS and CMOS processes and an ecosystem of manufacturing and design partners, X-FAB is the proven choice for process development and installation, process capability, design support and long-term manufacturing stability. As well as customer specific process installation, X-FAB offers a range of qualified, in-production, open-platform processes and IP blocks for key MEMS types.


Silver Sponsor

IMT is the premier independent MEMS technology and production services provider in United States. Since its start in 2000, IMT continues to offer the most complete turnkey services from design through high-volume production. As an acknowledged leader in complex MEMS, we offer our experience in a diversity of applications that include RF and DC switching; mirrors, microlenses, and optical benches for communications; drug discovery/delivery; biomedical implants and cell purifiers; microfluidics; valves and pumps; accelerometers; gyros; magnetic sensors; particle sensors; and gas and pressure sensors, among others. IMT’s comprehensive front-end wafer processing includes sub-micron photolithography, hermetic wafer-level packaging, isolated metal-filled through-silicon vias, wafer thinning/CMP, and extensive non-CMOS materials flexibility, complemented by unmatched metrology, FA, and testing capabilities. Speak with an IMT representative to see how we can make your MEMS work for you.


Silver Sponsor

OnScale is the world’s first Solver-as-a-Service platform – a combination of advanced computer-aided engineering (CAE) multi-physics solvers with a scalable Cloud high-performance computing (HPC) engine. OnScale breaks performance barriers for engineers by providing near-limitless Cloud HPC resources to solve today’s toughest engineering challenges. OnScale also breaks cost barriers for engineering teams of all sizes by providing world-class CAE multi-physics solvers and Cloud HPC on a subscription-based pay-as-you-go pricing model. With OnScale, engineers can run massive multi-million degree-of-freedom multi-physics simulations and vast numbers of simulations in parallel to optimize systems like ultrasonic transducer arrays for near-field 3D object classification for ADAS applications very quickly with minimal cost. Design studies that were once impossible with legacy CAE tools and on-premise HPC are now possible.


Silver Sponsor

The SAES Getters Group is the world leader in a variety of applications where vacuum, hermetic or ultra-high purity gas conditions are required. SAES Getters provides products that allow customers to achieve lifetime device integrity of their MEMS devices. There are many configurations of Getter solutions available for integration inside a device ranging from SAES' thin film page material deposited on lids or wafers, hydrogen only absorbing thin materials deposited on lids or sheets to porous Getters that are installed inside devices.


http://www.ulvac.com

Silver Sponsor

ULVAC Technologies, Inc. (ULVAC) was established in 1992 as the US subsidiary of ULVAC, Inc. Headquartered in Methuen, Massachusetts, ULVAC provides a broad portfolio of manufacturing equipment for the vacuum, materials and thin film industries. ULVAC's solutions diversely incorporate equipment, materials, analysis, and services for flat panel displays, electronic components, semiconductors, MEMS and general-industry equipment. In addition, the Methuen facility is equipped with a class-10 cleanroom for process development, customer demonstration and manufacturing of the ENVIRO solvent-free dry photo resist stripper and compound semiconductor materials etch systems. Other in-house services include foundry etch (for deep oxide and compound semiconductor materials), thermal processing, materials characterization, and vacuum pump/leak detector repair. ULVAC supports a variety of MEMS production technologies, for applications ranging from micro sensors to flow channel modules, optical switches, and bio-MEMS.


http://www.micralyne.com

Silver Sponsor, Lunch Sponsor

Micralyne is a leading independent MEMS and microfabrication foundry. We excel at creating process technology for complex MEMS devices and execute disciplined volume manufacturing. Micralyne extends its value to our customers by offering extensive packaging, testing, and design services, beyond a typical MEMS chip foundry. This Foundry Plus model has successfully produced products for industries such as: life sciences, aerospace, automotive, oil and gas, telecom, and industrial sensors. Micralyne offers our customers a strategic partnership with deep technical knowledge and fabrication capabilities. Our fabrication services fit their need by providing established process platforms and timely device fabrication through early prototype, qualification, and volume manufacturing.


Program Sponsor

Evatec supplies complete thin film deposition equipment and process solutions to the advanced packaging, semiconductor, optoelectronics and photonics industries using a range of evaporation and sputter platforms according to customers’ process, throughput and fab integration requirements. Within semiconductor, and MEMS in particular, our sputter solutions on CLUSTERLINE® for piezoelectrics like Sc doped AlN are aimed at production of high volume devices like microphones and ultrasonic transducers and enable high SNR in numerous applications. Dynamic sputter solutions on LLS EVO II offer cost effective production of laminated soft magnetic stacks such as CTZ/FeCoB with tunable properties for on-chip inductors paving the way for lower power consumption at higher frequencies.


http://www.lqa.com

Innovation Sponsor

Quantum Analytics is a value-added distributor, offering customized in-line production control and R&D metrology solutions. Financing options, technical services, including cross-platform system integration, installation, training and support come standard. We have partnered with a number of equipment manufactures to deliver contact-free, non-destructive, high-speed solutions to help keep pace with the growing demand for accurate process control. With platforms ranging from table-top to fully-automated systems, we offer flexible, configurable systems to address specific application needs. The digital holographic microscope (DHM®) allows direct full-field measurements of static and dynamic 3D topography at unrivaled speeds, without any vertical or lateral scanning. This unique acquisition mode makes the DHM® very robust against environmental production vibrations and noise. Its ability to observe and measure energized MEMS devices in real time makes it ideal for the investigation of dynamic processes.


http://www.classone.com

Panel Sponsor

ClassOne Technology designs and manufactures new advanced wet-chemical process tools – electroplating tools, spray solvent tools, and spin rinse dryers - especially for the cost-sensitive producers of MEMS, power devices, RF, LEDs, photonics, sensors, microfluidics and other emerging technologies. We provide innovative new solutions for a range of applications on 3" to 8" substrates of many materials, including silicon, glass, sapphire, GaAs, GaN, Ge, InP and HgCdTe. ClassOne’s Solstice electroplating systems are available in either manual 2-chamber or fully automated, cassette-to-cassette 4- and 8-chamber configurations. The Solstice performs key processes such as Cu TSV plating, wafer-level packaging plating processes, low-stress Ni plating, cyanide and non-cyanide Au electroplating, in addition to other electroplating processes. ClassOne’s Trident Spray Solvent Tool (SST) is the next generation of batch-processing SSTs for metal lift-off, photoresist strip, polymer removal and other demanding solvent based processes.


Lunch Sponsor

Smart devices, harsh environment sensing, intraoperative cancer detection, foldable paper electronics, and wearable medical devices are some examples of sensor-based technology pioneered at the Berkeley Sensor & Actuator Center, a Graduated NSF Industry/University Cooperative Research Center for Micro/Nanoelectromechanical Sensors & Systems (MEMS/NEMS). Current research at BSAC will have an even greater impact on consumer, industrial, and medical products. Contact us for information on how to become involved with new and improved technology being developed at BSAC.


Lunch Sponsor

GDSI is the first true, bona fide service company in the USA to offer non-contact dicing using the Stealth Laser approach. Dicing represents one of numerous physical challenges with producing MEMS and sensor devices on a commercial scale. Stealth creates an internal scribe or modification layer in the material, eliminating the need to protect your device layer. Same day service is possible. 25+ years of experience supporting both NPI and production programs in the Silicon Valley. Special emphasis on custom thinning, dicing, automated pick and inspection of fragile parts with protection of the device in mind. ISO 9001:2015 registered with a robust quality management system. Offering consultation on mask layout so your MEMS wafer can accommodate Stealth Laser dicing. GDSI collaborates with several large IC foundries and MEMS manufacturing groups, focusing on yield improvement and design for manufacturability for your device.


http://www.planoptik.com

Lunch Sponsor

Plan Optik AG is the leading manufacturer of structured wafers when it comes to technology. In sectors such as consumer electronics, automotive, aerospace, chemistry and pharmaceuticals, these wafers are essential components used as active elements for numerous applications in MEMS technology. The wafers of glass, glass-silicon compounds or quartz are available in sizes up to 300 mm diameter. Wafers by Plan Optik provide high-precision surfaces in the ångström range, which are achieved through the use of the MDF polishing process developed by the company. Plan Optik wafers are available to minimum tolerances with application-specific structuring and complex material combinations. Plan Optik AG's extensive experience in the integration of optical, electronic or chemical functions within a wafer as the basis of MEMS applications has made the company the preferred partner of large international manufacturers.


Lunch Sponsor

Polytec is a world leader in optical measurement systems with a wide variety of solutions for product development and research in micro- and nanotechnology applications. Whether you want to efficiently measure MEMS right on the wafer-level, test prototypes for process optimization, characterize cMUTs, pMUTs, SAWs and BAWs in real-time, validate models, conduct extensive and precise micromechanics analysis, test the reliability and service life of MEMS, or characterize MEMS in biology and medicine, we have a custom solution for you. Our newly released MSA-600 Micro System Analyzer enhances the quality and performance of static and dynamic characterization and visualization of MEMS devices and microstructures: validate FE models, detect the effects of cross-talk and the finest profile deviations early on. This optical measuring station offers non-contact surface characterization and vibration analysis in-plane and out-of-plane. In addition to the MSA-600, our MSA-100-3D system features 3D laser vibrometry for dynamic characterization of MEMS. The MSA-100-3D enables real-time measurement of tri-axial motion with picometer resolution and MHz bandwidth. Automated scan measurement capability provides 3D animations for visualization of complex deflection shapes. Our technology and custom solutions are widely used in the MEMS research community.


http://www.siconnex.com

Lunch Sponsor

Siconnex is a global leading equipment manufacturer for the semiconductor and related industries. Siconnex provides surface preparation equipment and processes, including WET BATCHSPRAY systems (etch, clean, resist strip) for the III-V semiconductor, MEMS, wireless, power, energy harvesting, WLP, data storage and logic industries.

The process technologies at Siconnex help to make innovations like smartphones, solar panels and power electronics more affordable and accessible to consumers and businesses around the world. Siconnex systems are leading when an extremely small footprint, safety, full automation, high throughput and economical resource consumption is important.


http://www.vatvalve.com

Breakfast Sponsor

“VAT – More than Vacuum Valves” Over the past fifty years VAT developed a reputation as a worldwide leader in vacuum valve technology. VAT continues to innovate and also offers forward integrated modules, custom engineered edge welded bellows solutions and VAT Global Services for repair, upgrades and spare parts programs. Custom engineered integrated module solutions simplify the customer system and supply chain. VAT modules integrate valves, pumping lines and other components to reduce footprint, reduce sealing lines and optimize performance. Custom engineered edge welded bellows solutions adhere to the highest quality and cleanliness standards of the most demanding applications. Our highly automated bellows stamping and welding processes ensure stable production and ramp readiness. VAT Global Services provides a local support solution for all valve applications. VAT Global Services offers repair, upgrades and spare parts programs designed to improve system up time and productivity. VAT’s global team is comprised of application and design engineers, service technicians and customer-oriented support teams who offer comprehensive assistance and advice that address specific customer needs from concept-to-finish and everywhere in between.


http://mems-foundry.com

Internet Sponsor

MEMS Foundry offers standard and customized bipolar and bicmos wafer foundry processes on 100mm and 150mm wafers. MEMS Foundry has the experience and expertise to develop custom semiconductor process flows around a MEMS smart sensor, resonator or optical device starting from a pure R & D concept to volume production. Located in the heart of Silicon Valley, MEMS Foundry is ideal for customers who need to develop a full custom MEMS product requiring a unique process flow. MEMS Foundry offers Process Integration of many types of sensors requiring nonstandard process flows otherwise unavailable from high volume wafer fabrication entities. MEMS smart sensors are used in avionics, automotive, communications, computing, defense, medical, military, optoelectronics, telecommunications, space and wireless applications. Smart MEMS are built in USA which is an added benefit to customers with proprietary IP. Customers with special process needs and small volume runs are welcome. MEMS Foundry is a self-sufficient, vertically integrated wafer fabrication based in Silicon Valley. MEMS Foundry has recently upgraded its toolset capabilities with a 5X stepper capable of processing 250 micron to 700-micron thick wafers, two Ion implanters and several dry etchers. MEMS Foundry customers have the option for monolithic integration with BIPOLAR, BICMOS or CMOS as well as package-level integration. Fabless customers can take advantage of the rare set of semiconductor manufacturing capabilities at MEMS Foundry to develop and manufacture of a wide range of MEMS smart sensor products.


http://www.plasmatherm.com

Internet Sponsor

Plasma-Therm® is a leading provider of advanced plasma processing equipment. Plasma-Therm systems perform critical process steps in the fabrication of integrated circuits, micro-mechanical devices, solar power cells, lighting, and components of products from computers and home electronics to military systems and satellites. Specifically, Plasma-Therm systems employ innovative technology to etch and deposit thin films. The company's Mask Etcher® series for photomask production has exceeded technology roadmap milestones for more than 15 years. Plasma-Therm’s Singulator® systems bring the precision and speed of plasma dicing to chip-packaging applications. Manufacturers, academic and governmental institutions depend on Plasma-Therm equipment, designed with “lab-to-fab” flexibility to meet the requirements of both R&D and volume production. Plasma-Therm's products have been adopted globally and have earned their reputation for value, reliability, and world-class support. Customers consistently rank Plasma-Therm among the top equipment suppliers, with multiple awards in the annual VLSIresearch Customer Satisfaction Survey, including being named “Ranked 1st” Etch and Clean Equipment Supplier five years in a row.


http://www.mems-exchange.org

Media Sponsor

The MEMS and Nanotechnology Exchange (MNX) has been providing services to the U.S. research community since 1999. We have completed over 2300 unique development and fabrication projects for our customers. We have thousands of MEMS and Nano process technologies available in our advanced processing facility, along with technical assistance from experienced and talented fabrication and process development engineers. MNX can provide a complete range of services to researchers who need a trusted partner at any project phase, including early-stage development, design and modeling, prototype fabrication, or transition to manufacturing. Contact us at www.mems-exchange.org to ask how we can help you quickly and affordably transform your concept from prototype to production!


https://www.avs.org/Chapters/NCCAVS

Media Sponsor

As a member-driven, interdisciplinary organization, AVS supports networking among academic, industrial, government, and consulting professionals involved in a variety of disciplines—chemistry, physics, materials science, engineering biology, mathematics, business, sales, etc. through common interests related to the basic science, technology development, and commercialization of materials, interfaces, and processing. Founded in 1953, AVS is organized into technical divisions and groups that encompass a range of established as well as emerging science and technology areas. There are also regional chapters, international chapters and affiliates, and student chapters that promote communication and networking for professionals and students within a geographical region. AVS is comprised of approximately 4,500 members worldwide and welcomes all member and non-member scientists, technologists, students, and educators to participate in its national and regional events. Drawing members from materials science and vacuum-related industries, equipment suppliers, universities, and national labs, the Northern California Chapter of AVS (NCCAVS) is the Society's largest--supporting all of Northern California and Nevada.